Plasma in Microchannel
نویسندگان
چکیده
Gas plasma, a fourth state of matter, is a neutral composition of ions, electrons, radicals, and photons that is synthesized by applying energy to a gas at atmospheric pressure or within a vacuum. Gas plasma can be used to enhance the functionality of microdevices for various biological and chemical applications. The effects of plasma in microchannels are regulated by parameters such as the type of gas, power intensity, chamber pressure and duration of the treatment.
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